查看完整版本: An Introduction to Microelectromechanical Systems Engineering (Second Edition)

An Introduction to Microelectromechanical Systems Engineering (Second Edition)

MEMS入门级的好书
preface:
According to my best recollection, the acronym for microelectromechanical systems
(MEMS) was officially adopted by a group of about 80 zealots at a crowded meeting
in Salt Lake City in 1989 called the Micro Tele-Operated Robotics Workshop. I
was there to present an invited paper that claimed MEMS should be used to fabricate
resonant structures for the purposes of timekeeping, and I was privileged to be
part of this group of visionaries for one and a half exciting days. The proceedings
may not be in print any longer. However, I recall that they were given an Institute of
Electrical and Electronic Engineers (IEEE) catalog number of 89TH0249-3. Discussion at the workshop about the name of this new field of research raged for over an hour, and several acronyms were offered, debated, and rejected. When the dust settled, I recall that Professor Roger Howe of the University of California at Berkeley stood up and announced, “Well, then, the name is MEMS.” In this way, the group came to consensus. The research they conducted, unique to any currently being conducted in the United States (or the world for that matter) would hereafter be known as “MEMS.”

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